Nanofabricated solid immersion lenses registered to single emitters in diamond

Journal article

We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged n...

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Authors: Marseglia, L; Hadden, J; Stanley-Clarke, A; Harrison, J; Patton, B

• Publication status: Published
• Journal: APPLIED PHYSICS LETTERS
• Volume: 98
• Issue: 13
• Pages: 133107-133107
• Publication date: 2011-03-28
• DOI: 10.1063/1.3573870
• ISSN: 0003-6951
• Language: English