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Factors affecting the accuracy of high resolution electron backscatter diffraction when using simulated patterns.

Abstract:

High resolution EBSD directly compares electron backscattering patterns (EBSPs), generated in a scanning electron microscope, to measure relative strain and rotation to a precision of ∼ 10(-4) in strain and 10(-4)rad (0.006 °) in rotation. However the measurement of absolute strain and rotation requires reference EBSPs of known strain and orientation (or a far field region of known strain). Recent suggestions of using simulated EBSPs with known strain show much promise. However precise measur...

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Publication status:
Published

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Journal:
Ultramicroscopy
Volume:
110
Issue:
12
Pages:
1443-1453
Publication date:
2010-11-05
DOI:
EISSN:
1879-2723
ISSN:
0304-3991
URN:
uuid:734e083d-f92a-49ac-a79b-22f88e2bc408
Source identifiers:
107121
Local pid:
pubs:107121

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