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Journal article

REACTION-MECHANISMS FOR THE PHOTON-ENHANCED ETCHING OF SEMICONDUCTORS - AN INVESTIGATION OF THE UV-STIMULATED INTERACTION OF CHLORINE WITH SI(100)

Publication status:
Published

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Authors


JACKMAN, R More by this author
Journal:
SURFACE SCIENCE
Volume:
176
Issue:
1-2
Pages:
183-192
Publication date:
1986-10-05
DOI:
ISSN:
0039-6028
URN:
uuid:72ffcb67-e45a-49b5-b8cf-af70ebc1275d
Source identifiers:
42665
Local pid:
pubs:42665

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