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Towards sub-0.5 angstrom beams through aberration corrected STEM

Abstract:
Correction of spherical aberration (C-S) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.
Publication status:
Published

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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Krivanek, OL More by this author
Murfitt, MF More by this author
Szilagyi, Z More by this author
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Issue:
179
Pages:
159-164
Publication date:
2004
ISSN:
0951-3248
URN:
uuid:6eb3000e-4a9e-46a2-9052-14742c047c04
Source identifiers:
28220
Local pid:
pubs:28220
ISBN:
0-7503-0967-9

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