Journal article
Mechanism for secondary electron dopant contrast in the SEM
- Abstract:
-
The growing use of secondary electron imaging in the scanning electron microscope (SEM) to map dopant distributions has stimulated an increasing interest in the mechanism that gives rise to so-called dopant contrast. In this paper a range of experimental results are used to demonstrate the wide applicability of the technique. These results are then incorporated into a model where, in particular, the effect of the surface barrier and the vacuum level are considered. It is found that the domina...
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- Publication status:
- Published
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- Publisher copy:
- 10.1093/oxfordjournals.jmicro.a023811
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Bibliographic Details
- Publisher:
- Oxford University Press
- Journal:
- Journal of electron microscopy
- Volume:
- 49
- Issue:
- 2
- Pages:
- 311-321
- Publication date:
- 2000-01-01
- DOI:
- EISSN:
-
1477-9986
- ISSN:
-
0022-0744
- Source identifiers:
-
23668
Item Description
- Language:
- English
- Keywords:
- Pubs id:
-
pubs:23668
- UUID:
-
uuid:6e9eff79-5e47-463d-a071-5448ce4a2492
- Local pid:
- pubs:23668
- Deposit date:
- 2012-12-19
Terms of use
- Copyright date:
- 2000
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