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Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, part II: inelastic scattering.

Abstract:

The implementation of spherical aberration-corrected pre- and post-specimen lenses in the same instrument has facilitated the creation of sub-Angstrom electron probes and has made aberration-corrected scanning confocal electron microscopy (SCEM) possible. Further to the discussion of elastic SCEM imaging in our previous paper, we show that by performing a 3D raster scan through a crystalline sample using inelastic SCEM imaging it will be possible to determine the location of isolated impurity...

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Publication status:
Published

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Journal:
Ultramicroscopy More from this journal
Volume:
108
Issue:
12
Pages:
1567-1578
Publication date:
2008-11-01
DOI:
EISSN:
1879-2723
ISSN:
0304-3991
Language:
English
Keywords:
Pubs id:
pubs:30133
UUID:
uuid:6cf89912-36dc-4cf9-9873-e07ec43b00a7
Local pid:
pubs:30133
Source identifiers:
30133
Deposit date:
2012-12-19

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