Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, part II: inelastic scattering.

Journal article

The implementation of spherical aberration-corrected pre- and post-specimen lenses in the same instrument has facilitated the creation of sub-Angstrom electron probes and has made aberration-corrected scanning confocal electron microscopy (SCEM) possible. Further to the discussion of elastic SCEM imaging in our previous paper, we show that by performing a 3D raster scan through a crystalline sample using inelastic SCEM imaging it will be possible to determine the location of isolated impurity...

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Authors: D'Alfonso, A; Cosgriff, E; Findlay, S; Behan, G; Kirkland, A

• Publication status: Published
• Journal: Ultramicroscopy
• Volume: 108
• Issue: 12
• Pages: 1567-1578
• Publication date: 2008-11-01
• DOI: 10.1016/j.ultramic.2008.05.007
• EISSN: 1879-2723
• ISSN: 0304-3991
• Language: English
• Keywords: Electron energy loss spectroscopy; Scanning confocal electron microscopy (SCEM); Scanning transmission electron microscopy (STEM); Depth sectioning