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Understanding and optimising EBIC pn-junction characterisation from modelling insights

Abstract:

In this paper, the physical mechanisms involved in electron beam induced current (EBIC) imaging of semiconductor pn-junctions are reviewed to propose a model and optimise the acquisition of experimental data. Insights are drawn on the dependence of the EBIC signal with electron accelerating voltage and surface conditions. It is concluded that improvements in the resolution of EBIC are possible when the surface conditions of the specimens are carefully considered and optimised. Lower accelerat...

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Publication status:
Published
Peer review status:
Peer reviewed

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Publisher copy:
10.1063/1.5139894

Authors


More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Sub department:
Materials
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Sub department:
Materials
Role:
Author
ORCID:
0000-0002-3832-7178
More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Sub department:
Materials
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Sub department:
Materials
Role:
Author
More from this funder
Name:
Engineering & Physical Sciences Research Council
Grant:
EP/M022196/1
Publisher:
AIP Publishing
Journal:
Journal of Applied Physics More from this journal
Volume:
127
Issue:
2
Article number:
024502
Publication date:
2020-01-08
Acceptance date:
2019-12-17
DOI:
EISSN:
1089-7550
ISSN:
0021-8979
Pubs id:
pubs:1081202
UUID:
uuid:69798fa8-d254-496c-841a-ebe24a9739d8
Local pid:
pubs:1081202
Source identifiers:
1081202
Deposit date:
2020-01-08

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