Residual stress measurement in thin films using the semi-destructive ring-core drilling method using Focused Ion Beam (11TH INTERNATIONAL CONFERENCE ON THE MECHANICAL BEHAVIOR OF MATERIALS (ICM11), 2011)

(untitled) - Song, X; Yeap, K; Zhu, J; Belnoue, J; Sebastiani, M; Bemporad, E; Zeng, K; Korsunsky, A