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Investigation of fabrication uniformity and emission reliability of silicon field emitters for use in space

Abstract:

A silicon field emitter neutralizer is under development at the Rutherford Appleton Laboratory for the LISA Pathfinder mission [B.J. Kent, Class Quantum Grav. 22, S483 (2005)]. A summary of this project from the fabrication point of view is presented in this article. An investigation of the effect of fabrication uniformity on emission characteristics showed that the geometrical nonuniformity, including tip height and gate diameter, across a 4-in. wafer is below 15%. This variation had only a ...

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Publisher copy:
10.1116/1.2165668

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Journal:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures More from this journal
Volume:
24
Issue:
2
Pages:
1072-1075
Publication date:
2006-03-01
DOI:
ISSN:
1071-1023
Language:
English
Pubs id:
pubs:151411
UUID:
uuid:68bcf321-9391-4704-82ce-0c37ab0ce789
Local pid:
pubs:151411
Source identifiers:
151411
Deposit date:
2012-12-19

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