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Progress in aberration-corrected scanning transmission electron microscopy.

Abstract:

A new corrector of spherical aberration (C(S)) for a dedicated scanning transmission electron microscope (STEM) is described and its results are presented. The corrector uses strong octupoles and increases C(C) by only 0.2 mm relative to the uncorrected microscope. Its overall stability is greatly improved compared to our previous design. It has achieved a point-to-point resolution of 1.23 A in high-angle annular dark field images at 100 kV. It has also increased the current available in a 1....

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Publication status:
Published

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Publisher copy:
10.1093/jmicro/50.3.177

Authors


Krivanek, OL More by this author
More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Batson, PE More by this author
Lupini, AR More by this author
Journal:
Journal of electron microscopy
Volume:
50
Issue:
3
Pages:
177-185
Publication date:
2001
DOI:
EISSN:
1477-9986
ISSN:
0022-0744
URN:
uuid:5932dfb8-2a53-49af-8f33-bee82f587977
Source identifiers:
4327
Local pid:
pubs:4327

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