Journal article
High resolution visualization of acoustic wave fields within surface acoustic wave devices
- Abstract:
- We present the submicron visualization of surface acoustic wave (SAW) fields within interdigital transducers (IDTs) obtained by a scanning acoustic force microscope. Utilizing the nonlinear force curve of the tip-to-surface interaction, a periodic deflection of the cantilever appears when the SAWs are excited intermittently. This deflection depends on the amplitude of the surface oscillation and was measured by lock-in technique. SAWs with operating frequencies above 600 MHz were detected. The influence of the mass loading on the local oscillation amplitude was studied for various layer thicknesses of the IDT electrodes. © 1997 American Institute of Physics.
- Publication status:
- Published
Actions
Authors
- Journal:
- APPLIED PHYSICS LETTERS More from this journal
- Volume:
- 70
- Issue:
- 11
- Pages:
- 1372-1374
- Publication date:
- 1997-03-17
- DOI:
- ISSN:
-
0003-6951
- Pubs id:
-
pubs:151528
- UUID:
-
uuid:551f5311-c9e7-4ed6-bf51-fd4a19968051
- Local pid:
-
pubs:151528
- Source identifiers:
-
151528
- Deposit date:
-
2012-12-19
Terms of use
- Copyright date:
- 1997
If you are the owner of this record, you can report an update to it here: Report update to this record