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Measurement of two dimensional velocity distributions of ions in a plasma chamber

Abstract:

The paper reports on non-invasive measurements of the two-dimensional velocity distributions of species in a plasma. In this report, the technique of recovering velocity information from measurements of Doppler shifts in the absorption frequency of a species is applied to the lower concentrations of ions in a reactive ion etching chamber. In addition, the B-X electronic system of N2 ions is probed and the Doppler profile is built. By combining several profiles, it became possible to invert to...

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Institution:
University of Oxford
Division:
MPLS
Department:
Chemistry
Sub department:
Physical & Theoretical Chem
Role:
Author
Publisher:
IEEE
Journal:
IEEE International Conference on Plasma Science
Pages:
135-135
Publication date:
1994-01-01
ISSN:
0730-9244
Source identifiers:
332010
Language:
English
Pubs id:
pubs:332010
UUID:
uuid:52de30d2-a81d-4c1b-b286-3686ed6edb79
Local pid:
pubs:332010
Deposit date:
2012-12-19

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