Journal article

Measurement of two dimensional velocity distributions of ions in a plasma chamber

Abstract:: The paper reports on non-invasive measurements of the two-dimensional velocity distributions of species in a plasma. In this report, the technique of recovering velocity information from measurements of Doppler shifts in the absorption frequency of a species is applied to the lower concentrations of ions in a reactive ion etching chamber. In addition, the B-X electronic system of N2 ions is probed and the Doppler profile is built. By combining several profiles, it became possible to invert to...
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APA Style

Hancock, G., Lanyi, L., & Woodcock, B. (1994). Measurement of two dimensional velocity distributions of ions in a plasma chamber. IEEE International Conference on Plasma Science, 135–135.

MLA Style

Hancock, G., et al. “Measurement of Two Dimensional Velocity Distributions of Ions in a Plasma Chamber.” IEEE International Conference on Plasma Science, IEEE, 1994, pp. 135–35.

Chicago Style

Hancock, G, L Lanyi, and B Woodcock. 1994. “Measurement of Two Dimensional Velocity Distributions of Ions in a Plasma Chamber.” IEEE International Conference on Plasma Science, 135–35.
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Authors

+ Hancock, G More by this author

Institution:

University of Oxford

Division:

MPLS

Department:

Chemistry

Sub department:

Physical & Theoretical Chem

Role:

Author

+ Lanyi, L More by this author

Role:

Author

+ Woodcock, B More by this author

Role:

Author

Bibliographic Details

Publisher:: IEEE
Journal:: IEEE International Conference on Plasma Science More from this journal
Pages:: 135-135
Publication date:: 1994-01-01
ISSN:: 0730-9244

Item Description

Language:: English
Pubs id:: pubs:332010
UUID:: uuid:52de30d2-a81d-4c1b-b286-3686ed6edb79
Local pid:: pubs:332010
Source identifiers:: 332010
Deposit date:: 2012-12-19

Terms of use

Copyright date:: 1994

Licence:: Terms and Conditions of Use for Oxford University Research Archive

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