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A COMPARATIVE-STUDY OF THE ADSORPTION OF HOT-FILAMENT ACTIVATED HYDROCARBONS ON SILICON, GALLIUM-ARSENIDE AND CVD DIAMOND

Abstract:

Adsorption studies of hot filament activated methane and methane-hydrogen mixtures on non-diamond and diamond surfaces reveal considerable differences in both the nature of the species formed on the surface and the subsequent surface lifetimes of these forms. In the case of GaAs(100), no evidence is seen either for adsorption of the species believed to be present in the activated gas mix (such as C1 and C2 hydrocarbons) in an unreacted form or for thermal decomposition of the adlayer into car...

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Publication status:
Published

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Authors


JACKMAN, R More by this author
KINGSLEY, C More by this author
Volume:
3
Issue:
4-6
Pages:
706-710
Publication date:
1994-04-05
DOI:
ISSN:
0925-9635
URN:
uuid:4a0736e6-9cee-496f-8b1f-6cd2f1b4f5d7
Source identifiers:
44526
Local pid:
pubs:44526

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