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Detection of small lattice strains using beam rocking on a nuclear microprobe

Abstract:

Beam rocking is a new technique in nuclear microscopy which has been developed at the Oxford nuclear microprobe to produce angle-resolved channelling information from small areas of crystalline material without any rotation or translation of the sample. This paper describes a different application of beam rocking whereby a focused 3 MeV proton beam has been used to detect and quantify small interface rotation angles in strained Si1-xGex/Si samples with 0.015 < x < 0.175, where the sampl...

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Publication status:
Published

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Journal:
NUCLEAR INSTRUMENTS and METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume:
136
Pages:
1240-1243
Publication date:
1998-03-01
Event title:
13th International Conference on Ion Beam Analysis (IBA-13)
DOI:
ISSN:
0168-583X
Source identifiers:
25795
Keywords:
Pubs id:
pubs:25795
UUID:
uuid:3dba9310-ea57-4c27-b355-7c9196f42fc9
Local pid:
pubs:25795
Deposit date:
2012-12-19

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