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Force microscopy for the investigation of high-frequency surface acoustic wave devices

Abstract:

Surface acoustic wave (SAW) devices are of great importance in mobile communication and signal processing applications. For their optimization second-order effects, like diffraction or mass loading, have to be studied. However, meeting today's demands of GHz operation new ways of wave field mapping have to be developed, since common methods, like laser optical or electron microscope probing, are resolution limited to the micron range. Scanning acoustic force microscopy (SAFM) allows the detec...

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Publication status:
Published

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Publisher copy:
10.1007/s003390051155

Authors


More by this author
Institution:
University of Oxford
Department:
Oxford, MPLS, Physics, Condensed Matter Physics
Frohlich, HJ More by this author
Journal:
APPLIED PHYSICS A-MATERIALS SCIENCE and PROCESSING
Volume:
66
Issue:
SUPPL. 1
Pages:
S325-S328
Publication date:
1998-03-05
DOI:
EISSN:
1432-0630
ISSN:
0947-8396
URN:
uuid:3cacf0bc-06fb-4c53-948b-e9d8397b0587
Source identifiers:
151517
Local pid:
pubs:151517
Language:
English

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