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Force microscopy for the investigation of high-frequency surface acoustic wave devices

Abstract:

Surface acoustic wave (SAW) devices are of great importance in mobile communication and signal processing applications. For their optimization second-order effects, like diffraction or mass loading, have to be studied. However, meeting today's demands of GHz operation new ways of wave field mapping have to be developed, since common methods, like laser optical or electron microscope probing, are resolution limited to the micron range. Scanning acoustic force microscopy (SAFM) allows the detec...

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Publication status:
Published

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Publisher copy:
10.1007/s003390051155

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Institution:
University of Oxford
Division:
MPLS
Department:
Physics
Sub department:
Condensed Matter Physics
Role:
Author
Journal:
APPLIED PHYSICS A-MATERIALS SCIENCE and PROCESSING
Volume:
66
Issue:
SUPPL. 1
Pages:
S325-S328
Publication date:
1998-03-01
DOI:
EISSN:
1432-0630
ISSN:
0947-8396
Source identifiers:
151517
Language:
English
Pubs id:
pubs:151517
UUID:
uuid:3cacf0bc-06fb-4c53-948b-e9d8397b0587
Local pid:
pubs:151517
Deposit date:
2012-12-19

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