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Measurement and modeling of a diamond deposition reactor: Hydrogen atom and electron number densities in an Ar/H 2 arc jet discharge

Abstract:

The gas-phase chemistry underpinning the growth of polycrystalline diamond in a dc arc jet reactor operating with a CH 4/H 2/Ar mixture was analyzed. A combination of optical emission and cavity ring-down spectroscopy (CRBS) of electronically excited hydrogen atoms and two-dimensional modeling was used. It was observed that at low F° H2, the maximum in the electron and the H(n=2) atom distributions occur in spatial regions of the plume. It was found that Stark broadening of the Balmar-β trans...

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Publisher copy:
10.1063/1.1906288

Authors


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Institution:
University of Oxford
Department:
Oxford, MPLS, Chemistry
Orr-Ewing, AJ More by this author
Ashfold, MNR More by this author
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Journal:
Journal of Applied Physics
Volume:
97
Issue:
11
Pages:
113306-113306
Publication date:
2005
DOI:
ISSN:
0021-8979
URN:
uuid:3b596fba-6688-40a5-b853-879953a14c59
Source identifiers:
281406
Local pid:
pubs:281406
Language:
English

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