Journal article
THE INITIAL-STAGES OF DIAMOND GROWTH - AN ADSORPTION STUDY OF HOT-FILAMENT ACTIVATED METHANE AND HYDROGEN ON SI(100)
- Abstract:
-
The adsorption of hot filament "activated" methane and hydrogen on Si(100) has been probed with Auger electron and thermal desorption spectroscopies. Whilst the molecular forms of these gases do not adsorb, bound hydrocarbon species are formed on the Si surface after flowing methane over a tantalum filament held at 2200 K. Adsorbed ethylene and acetylene are both present. The reactions promoted in this adsorbed layer by impinging atomic hydrogen have been studied. Atomic hydrogen abstraction ...
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- Publication status:
- Published
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- Publisher copy:
- 10.1016/0039-6028(93)90389-2
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Authors
Bibliographic Details
- Journal:
- SURFACE SCIENCE
- Volume:
- 292
- Issue:
- 1-2
- Pages:
- 47-60
- Publication date:
- 1993-07-20
- DOI:
- ISSN:
-
0039-6028
- URN:
-
uuid:3a7433b6-11c3-470e-9758-b75388d50ed2
- Source identifiers:
-
44179
- Local pid:
- pubs:44179
Item Description
- Language:
- English
Terms of use
- Copyright date:
- 1993
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