- Abstract:
-
The adsorption of hot filament "activated" methane and hydrogen on Si(100) has been probed with Auger electron and thermal desorption spectroscopies. Whilst the molecular forms of these gases do not adsorb, bound hydrocarbon species are formed on the Si surface after flowing methane over a tantalum filament held at 2200 K. Adsorbed ethylene and acetylene are both present. The reactions promoted in this adsorbed layer by impinging atomic hydrogen have been studied. Atomic hydrogen abstraction ...
Expand abstract - Publication status:
- Published
- Publisher copy:
- 10.1016/0039-6028(93)90389-2
-
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- Journal:
- SURFACE SCIENCE
- Volume:
- 292
- Issue:
- 1-2
- Pages:
- 47-60
- Publication date:
- 1993-07-20
- DOI:
- ISSN:
-
0039-6028
- URN:
-
uuid:3a7433b6-11c3-470e-9758-b75388d50ed2
- Source identifiers:
-
44179
- Local pid:
- pubs:44179
- Language:
- English
- Copyright date:
- 1993
Journal article
THE INITIAL-STAGES OF DIAMOND GROWTH - AN ADSORPTION STUDY OF HOT-FILAMENT ACTIVATED METHANE AND HYDROGEN ON SI(100)
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