The development of a 200 kV monochromated field emission electron source.

Journal article

We report the development of a monochromator for an intermediate-voltage aberration-corrected electron microscope suitable for operation in both STEM and TEM imaging modes. The monochromator consists of two Wien filters with a variable energy selecting slit located between them and is located prior to the accelerator. The second filter cancels the energy dispersion produced by the first filter and after energy selection forms a round monochromated, achromatic probe at the specimen plane. The ...

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Authors: Mukai, M; Kim, J; Omoto, K; Sawada, H; Kimura, A

• Publication status: Published
• Publisher: Elsevier
• Journal: Ultramicroscopy
• Volume: 140
• Pages: 37-43
• Publication date: 2014-05-01
• DOI: 10.1016/j.ultramic.2014.02.004
• EISSN: 1879-2723
• ISSN: 0304-3991
• Language: English
• Keywords: Electron energy-loss spectroscopy; High-resolution imaging; Energy resolution; Monochromator; Aberration correction; Wien filter