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Blowing Polysilicon Fuses

Abstract:

Polysilicon fuses are micron sized components of silicon chips. Unlike conventional fuses, they are blown as an irreversible programming step. They are used to isolate circuitry, to tune performance or to specialise the device. A fuse must be blown by applying a precise voltage which currently can only be determined by lengthly experimentation. A mathematical model of the blowing process could be used to eliminate the experimental step reducing the development time needed for new devices. We ...

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Publication status:
Published

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Publisher copy:
10.1063/1.3241370

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Institution:
University of Oxford
Department:
Oxford, MPLS, Mathematical Inst
Role:
Author
Volume:
1168
Pages:
1461-1464
Publication date:
2009-01-01
DOI:
EISSN:
1551-7616
ISSN:
0094-243X
URN:
uuid:340dbbe4-8193-49f3-9f44-ac599f1c1e57
Source identifiers:
202941
Local pid:
pubs:202941
ISBN:
978-0-7354-0709-1

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