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Blowing Polysilicon Fuses

Abstract:

Polysilicon fuses are micron sized components of silicon chips. Unlike conventional fuses, they are blown as an irreversible programming step. They are used to isolate circuitry, to tune performance or to specialise the device. A fuse must be blown by applying a precise voltage which currently can only be determined by lengthly experimentation. A mathematical model of the blowing process could be used to eliminate the experimental step reducing the development time needed for new devices. We ...

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Publication status:
Published

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Publisher copy:
10.1063/1.3241370

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Institution:
University of Oxford
Division:
MPLS
Department:
Mathematical Institute
Role:
Author
Volume:
1168
Pages:
1461-1464
Host title:
NUMERICAL ANALYSIS AND APPLIED MATHEMATICS, VOLS 1 AND 2
Publication date:
2009-01-01
DOI:
EISSN:
1551-7616
ISSN:
0094-243X
Source identifiers:
202941
ISBN:
9780735407091
Pubs id:
pubs:202941
UUID:
uuid:340dbbe4-8193-49f3-9f44-ac599f1c1e57
Local pid:
pubs:202941
Deposit date:
2012-12-19

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