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Vacuum deposition of high performance gas barrier materials

Abstract:
High performance flexible barrier films produced by roll-to-roll processing are required for applications such as OLEDs, PVs and transistors. This paper presents the development of barrier layer technology for electronics applications on our vacuum web coating research facility. There is a capability of organic and inorganic layer deposition, with this paper focusing particularly on DC and RF sputtering onto acrylate smoothed substrates.

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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Role:
Author
Journal:
Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 22nd International Vacuum Web Coating Conference 2008
Volume:
3
Pages:
1120-1151
Publication date:
2008-01-01
URN:
uuid:2d9cf9e8-ae48-4d84-a684-59545d3759c9
Source identifiers:
351459
Local pid:
pubs:351459
Language:
English

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