- Abstract:
- High performance flexible barrier films produced by roll-to-roll processing are required for applications such as OLEDs, PVs and transistors. This paper presents the development of barrier layer technology for electronics applications on our vacuum web coating research facility. There is a capability of organic and inorganic layer deposition, with this paper focusing particularly on DC and RF sputtering onto acrylate smoothed substrates.
- Journal:
- Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 22nd International Vacuum Web Coating Conference 2008
- Volume:
- 3
- Pages:
- 1120-1151
- Publication date:
- 2008-01-01
- URN:
-
uuid:2d9cf9e8-ae48-4d84-a684-59545d3759c9
- Source identifiers:
-
351459
- Local pid:
- pubs:351459
- Language:
- English
- Copyright date:
- 2008
Journal article
Vacuum deposition of high performance gas barrier materials
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