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Stress evaluation in thin films: Micro-focus synchrotron X-ray diffraction combined with focused ion beam patterning for d(o) evaluation

Abstract:

Nanocrystalline metallic coatings of sub-micron thickness are widely used in modern microelectronic applications. In X-ray diffraction experiments to determine both the residual and applied stresses in nanocrystalline coatings, one difficult challenge that comes up invariably is the determination of the strain-free lattice spacing d. The present study addresses this challenge by using the focused ion beam (FIB) to generate a built-in strain-free reference by patterning (milling) a 50 × 50 μm ...

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Publication status:
Published

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Publisher copy:
10.1016/j.tsf.2013.07.019

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Journal:
THIN SOLID FILMS
Volume:
549
Pages:
245-250
Publication date:
2013-12-31
DOI:
ISSN:
0040-6090
Source identifiers:
417323
Keywords:
Pubs id:
pubs:417323
UUID:
uuid:2d4c3dca-d158-4f61-ad7c-96cc76c8590b
Local pid:
pubs:417323
Deposit date:
2013-11-17

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