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Selected-area growth of carbon nanotubes by the combination of focused ion beam and chemical vapor deposition techniques.

Abstract:

In this article, we report a technique for growing carbon nanotubes in a more controllable fashion, which enables us to synthesize nanotubes directly in various forms of designed patterns. This nanofabrication process is based on a combination of focused ion beam (FIB) and chemical vapor deposition (CVD) techniques. In this process, arrays of conductive patterns were first deposited on silicon substrates by directing a gaseous compound (C(9)H(16)Pt) via the capillary needle-sized nozzles with...

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Publisher copy:
10.1017/S1431927603030460
Journal:
Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada More from this journal
Volume:
9
Issue:
6
Pages:
516-521
Publication date:
2003-12-01
DOI:
EISSN:
1435-8115
ISSN:
1431-9276
Language:
English
Keywords:
Pubs id:
pubs:482769
UUID:
uuid:27ebc997-0576-4a6f-9823-9156c3bf5ffe
Local pid:
pubs:482769
Source identifiers:
482769
Deposit date:
2014-09-14

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