Journal article icon

Journal article

CLASSICAL TRAJECTORY CALCULATIONS OF NONLINEAR SPUTTERING - SICL4 SPUTTERING OF A CU(001) SURFACE USING ABINITIO POTENTIALS

Abstract:

Classical trajectory calculations are carried out on SiCl4 sputtering of a Cu(001) surface. The repulsive Cu{single bond}Si and Cu{single bond}Cl interaction potentials are calculated using ab initio electronic structure theory. At energies of 120 eV or greater, the calculated sputtering yields are found to be greater than the sum of the component atomic sputtering yields. This effect cannot be explained by a thermal spike such as has been invoked to explain nonlinear sputtering at higher ene...

Expand abstract
Publication status:
Published

Actions


Access Document


Journal:
SURFACE SCIENCE More from this journal
Volume:
227
Issue:
3
Pages:
369-389
Publication date:
1990-03-01
DOI:
ISSN:
0039-6028
Language:
English
Pubs id:
pubs:52861
UUID:
uuid:21cf9262-e1c2-4fbd-bcee-cba7aa71f5b5
Local pid:
pubs:52861
Source identifiers:
52861
Deposit date:
2013-11-17

Terms of use


Views and Downloads






If you are the owner of this record, you can report an update to it here: Report update to this record

TO TOP