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Origin of the spatial resolution in atom probe microscopy

Abstract:

Atom-probe microscopy offers unprecedented insights on the subnanometer structure and chemistry of materials in three dimensions. The actual spatial resolution achievable is however still an uncertain parameter, as no comprehensive study has been undertaken to unveil the physics underpinning how key parameters impact the performance. Here, we present a comprehensive investigation of the in-depth and lateral resolution of the technique. We discuss methods to estimate the resolution and show a ...

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Publication status:
Published

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Publisher copy:
10.1063/1.3182351

Authors


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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
de Geuser, F More by this author
Stephenson, LT More by this author
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Journal:
APPLIED PHYSICS LETTERS
Volume:
95
Issue:
3
Pages:
034103-034103
Publication date:
2009-07-20
DOI:
ISSN:
0003-6951
URN:
uuid:20748427-2552-4ec9-8c51-41cb113a7be7
Source identifiers:
359559
Local pid:
pubs:359559
Language:
English
Keywords:

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