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Active microcantilevers based on piezoresistive ferromagnetic thin films

Abstract:

We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex pi...

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Publication status:
Published

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Publisher copy:
10.1063/1.3533390

Authors


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Institution:
University of Oxford
Department:
Oxford, MPLS, Materials
Garcia-Sanchez, D More by this author
Takeuchi, I More by this author
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Journal:
APPLIED PHYSICS LETTERS
Volume:
98
Issue:
1
Pages:
013502-013502
Publication date:
2011-01-03
DOI:
ISSN:
0003-6951
URN:
uuid:1fb42d40-69de-4df8-bc7e-594ad4ae709e
Source identifiers:
411018
Local pid:
pubs:411018
Language:
English

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