Active microcantilevers based on piezoresistive ferromagnetic thin films

Journal article

We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors. © 2011 American Institute of Physics.

Authors: Bhaskaran, H; Li, M; Garcia-Sanchez, D; Zhao, P; Takeuchi, I

• Publication status: Published
• Journal: APPLIED PHYSICS LETTERS
• Volume: 98
• Issue: 1
• Pages: 013502-013502
• Publication date: 2011-01-03
• DOI: 10.1063/1.3533390
• ISSN: 0003-6951
• Language: English