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Coherent X-ray measurements of ion-implantation-induced lattice strains in nano-crystals

Abstract:

Focussed Ion Beam (FIB) milling is a mainstay of nano-scale machining. By manipulating a tightly focussed beam of energetic ions, often gallium (Ga+), FIB can sculpt nanostructures via localised sputtering. This ability to cut solid matter on the nano-scale has revolutionised sample preparation across the life-, earth- and materials sciences. For example FIB is central to microchip prototyping, 3D material analysis, targeted electron microscopy sample extraction and the nanotechnology behin...

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Publication status:
Not published
Peer review status:
Not peer reviewed

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Institution:
University of Oxford
Division:
MPLS
Department:
Engineering Science
Role:
Author
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Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Role:
Author
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Funding agency for:
Hofmann, F
Grant:
RG130308
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Funding agency for:
Hofmann, F
Grant:
RG130308
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Funding agency for:
Tarleton, E
Grant:
EP/N007239/1
Volkswagen Foundation More from this funder
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Publisher:
arXiv Publisher's website
Series:
arXiv
Publication date:
2016-03-01
Source identifiers:
622379
Keywords:
Pubs id:
pubs:622379
UUID:
uuid:1e852529-6d61-4538-982d-fd91e99aa9a5
Local pid:
pubs:622379
Deposit date:
2016-05-16

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