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Hydrogen related defects in float zone silicon investigated using a shielded hydrogen plasma

Abstract:
Shielded Hydrogen Passivation (SHP) has been shown to be an effective technique to introduce atomic hydrogen to silicon samples. This allows the study of hydrogen related defects at a range of temperatures without any UV or other process damage. It is found that at 350°C, introduction of atomic hydrogen can cause near surface damage into n-type material that greatly reduces carrier lifetime. In contrast, p-type samples showed no initial degradation, followed by signs of degradation under hot light soaking.
Publication status:
Published
Peer review status:
Peer reviewed

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Publisher copy:
10.1109/pvsc.2018.8547713

Authors


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Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS
Department:
Materials
Oxford college:
Lincoln College
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Role:
Author
More by this author
Institution:
University of Oxford
Division:
MPLS Division
Department:
Materials
Role:
Author
More from this funder
Grant:
International
theSupersiliconproject(EP/M024911/1
IndustrialEngagementFund
Publisher:
IEEE Publisher's website
Journal:
2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC) Journal website
Pages:
0298-0302
Host title:
2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC)
Publication date:
2018-11-29
Acceptance date:
2018-03-16
Event start date:
2018-06-10T00:00:00Z
Event end date:
2018-06-15T00:00:00Z
DOI:
ISSN:
0160-8371
Source identifiers:
958825
ISBN:
9781538685297
Keywords:
Pubs id:
pubs:958825
UUID:
uuid:0a936621-ce65-4f49-b0cb-0aa54b447a36
Local pid:
pubs:958825
Deposit date:
2019-01-10

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