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1
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Journal article

Damage to epitaxial GaN layers by silicon implantation

  • Tan, HH, Williams, JS, Zou, J, et al.
  • 1996-10-14
2
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Journal article

Electrical and structural analysis of high-dose Si implantation in GaN

  • Zolper, JC, Tan, HH, Williams, JS, et al.
  • 1997-05-19
3
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Conference

Ion implantation processing of GaN epitaxial layers

  • Tan, HH, Williams, JS, Zou, J, et al.
  • 1996-01-01
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