1 - 2 of 2
1
Journal article icon
Journal article

Stress-assisted thermal diffusion barrier breakdown in ion beam deposited Cu/W nano-multilayers on Si substrate observed by in Situ GISAXS and transmission EDX

  • Romano Brandt, L, Salvati, E, Wermeille, D, et al.
  • 2021-01-28
2
Journal article icon
Journal article

Nano-scale residual stress depth profiling in Cu/W nano-multilayers as a function of magnetron sputtering pressure

  • Romano-Brandt, L, Salvati, E, Le Bourhis, E, et al.
  • 2019-11-22
FILTER RESULTS

TO TOP