Thesis
Laser studies of plasmas
- Abstract:
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Measurement of the intrinsic properties of processing plasmas is critically important in understanding discharges so that the optimum conditions can be achieved. Several different diagnostic methods have been developed and tested.
A planar probe has been used to measure the ion flux and electron temperature in both inductively coupled and capacitively coupled plasma systems, at various pressures and applied powers, using the assumption that the electron energy distribution is a Maxw...
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- Files:
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(Preview, pdf, 33.2MB, Terms of use)
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Authors
- Publication date:
- 2000
- DOI:
- Type of award:
- DPhil
- Level of award:
- Doctoral
- Awarding institution:
- University of Oxford
- Language:
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English
- Subjects:
- UUID:
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uuid:3de1c919-d7ce-485c-94c8-e5ab9e8e4a4b
- Local pid:
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td:603838383
- Source identifiers:
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603838383
- Deposit date:
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2013-01-18
- ARK identifier:
Terms of use
- Copyright holder:
- Jacobs, Robert
- Copyright date:
- 2000
- Notes:
- The digital copy of this thesis has been made available thanks to the generosity of Dr Leonard Polonsky
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