Electrical Characterization and Preliminary Beam Test Results of 3D Silicon CMS Pixel Detectors

Journal article

The fabrication of 3D detectors which requires bulk micromachining of columnar electrodes has been realized with advancements in MEMS technology. Since the fabrication of the first 3D prototype in Stanford Nanofabrication Facility in 1997, a significant effort has been put forth to transfer the 3D detector technology to large scale manufacturing for future high luminosity collider experiments, in which the radiation hardness will be the primary concern, and other applications such as medical ...

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Authors: Koybasi, O; Alagoz, E; Krzywda, A; Arndt, K; Bolla, G

• Publication status: Published
• Journal: IEEE TRANSACTIONS ON NUCLEAR SCIENCE
• Volume: 58
• Issue: 3
• Pages: 1315-1323
• Publication date: 2011-06-01
• DOI: 10.1109/TNS.2011.2117439
• EISSN: 1558-1578
• ISSN: 0018-9499
• Language: English
• Keywords: super-large Hadron Collider (LHC); beam test; CMS; radiation hardness; 3D silicon pixel detectors